A universal basic for creating microsensory devices those are sensitive to changing environmental conditions

Abstract

The main advantages of alumina technology and substrates of anodic alumina with a microrelief in the bulk of the substrate as a universal basis for creating microsensor devices are presented. Microsensors of various types allow you to monitor the state of the environment. Specific examples of the development of microsensory devices for detecting humidity, gas composition in the environment, and the presence of ionizing and ultraviolet radiation are presented.