CITATION STYLE
Jayapalan, K. K., Chin, O. H., & Wong, C. S. (2017). Radio frequency planar inductively coupled plasma: Fundamentals and applications. In Plasma Science and Technology for Emerging Economies: An AAAPT Experience (pp. 527–591). Springer Singapore. https://doi.org/10.1007/978-981-10-4217-1_10
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