Measurement of length and position with frequency combs

Abstract

We show two different absolute distance measurement methods with micrometer accuracy based on frequency combs, and we discuss possible applications. Using a mode- locked laser and MEMS-based tracking optics, we measure the 3D position of a retroreflector within 10 ms and with a 24 μm volumetric accuracy. We also investigate modulator-based combs and show that they enable highly sensitive surface topography measurements with microsecond acquisition times and micrometer precision. Moreover, the potential for photonic integration of frequency comb sources is explored.