A precise rotary actuator based on small perimeter difference using parallel compliant mechanism

Abstract

In the precise position fields, precise rotary actuators have played an important role all the time. In this paper, a precise rotary actuator based on small perimeter difference using parallel compliant mechanism is developed. With the help of parallel compliant mechanism, the precise rotary actuator has simple structure, few components and easy assembly procedures. In this paper, the parallel compliant mechanism consists of 16 right circular flexure hinges, where can produce micro displacement and keep high stiffness. Piezoceramic (PZT) is used to drive the parallel compliant mechanism. Because of its high resolution and other advantages of performances, the precise rotary actuator has high rotational motion resolution, which can reach microradian (μrad) level. The angular velocity and the torque are analyzed. Besides the stiffness and stress of compliant mechanism is calculated, which were validated by simulations of nonlinear Finite Element Analysis (FEA). We think the precise rotary actuator has certain application prospect.