Skip to main content
Journal ArticleOPEN ACCESS

A Room Temperature ZnO-NPs/MEMS Ammonia Gas Sensor

Nanomaterials (2022) 12(19)
DOI: 10.3390/nano12193287
26Citations
Citations of this article
17Readers
Mendeley users who have this article in their library.

Abstract

This study uses ultrasonic grinding to grind ZnO powder to 10–20-nanometer nanoparticles (NPs), and these are integrated with a MEMS structure to form a ZnO-NPs/MEMS gas sensor. Measuring 1 ppm NH3 gas and operating at room temperature, the sensor response for the ZnO-NPs/MEMS gas sensor is around 39.7%, but the origin-ZnO powder/MEMS gas sensor is fairly unresponsive. For seven consecutive cycles, the ZnO-NPs/MEMS gas sensor has an average sensor response of about 40% and an inaccuracy of

Author supplied keywords

References Powered by Scopus

Gas sensitivity of ZnO based thick film sensor to NH<inf>3</inf> at room temperature

Sensors and Actuators, B: Chemical
272Citations
N/AReaders
Get full text

Room-Temperature High-Performance H<inf>2</inf>S Sensor Based on Porous CuO Nanosheets Prepared by Hydrothermal Method

ACS Applied Materials and Interfaces
247Citations
N/AReaders
Get full text

Zinc oxide thin film gas sensor for detection of acetone

Journal of Materials Science
237Citations
N/AReaders
Get full text
View more at Scopus

Cited by Powered by Scopus

Tuning the surface morphologies of ZnO nanofilms for enhanced sensitivity and selectivity of CO<inf>2</inf> gas sensor

Applied Physics A: Materials Science and Processing
34Citations
N/AReaders
Get full text

Nanostructured metal oxide semiconductors and composites for reliable trace gas sensing at room temperature

Surfaces and Interfaces
34Citations
N/AReaders
Get full text

GaN/rGO nanocomposite gas sensor for enhanced NH<inf>3</inf> sensing performances at room temperature

Sensors and Actuators B: Chemical
21Citations
N/AReaders
Get full text
View more at Scopus

Register to see more suggestions

Mendeley helps you to discover research relevant for your work.

Already have an account?

Cite

CITATION STYLE

APA

Hsueh, T. J., & Ding, R. Y. (2022). A Room Temperature ZnO-NPs/MEMS Ammonia Gas Sensor. Nanomaterials, 12(19). https://doi.org/10.3390/nano12193287

Readers' Seniority

Tooltip

Researcher 3

50%

Lecturer / Post doc 2

33%

PhD / Post grad / Masters / Doc 1

17%

Readers' Discipline

Tooltip

Engineering 3

50%

Physics and Astronomy 2

33%

Materials Science 1

17%

Article Metrics

Tooltip
Mentions
Blog Mentions: 1
News Mentions: 1

Save time finding and organizing research with Mendeley

Sign up for free