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THz Generalized Ellipsometry Characterization of Highly-Ordered Three-Dimensional Nanostructures

  • Hofmann T
  • Schmidt D
  • Schubert M
Springer Berlin Heidelberg, (2013), 411-428
DOI: 10.1007/978-3-642-33956-1_11
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Hofmann, T., Schmidt, D., & Schubert, M. (2013). THz Generalized Ellipsometry Characterization of Highly-Ordered Three-Dimensional Nanostructures. In Ellipsometry at the Nanoscale (pp. 411–428). Springer Berlin Heidelberg. https://doi.org/10.1007/978-3-642-33956-1_11

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