Mass transfer model of sputtering from rod-like targets for synthesis of multielement nanocoatings

Abstract

This work develops the mathematical model that allows calculating element concentration depending on substrate location at low working gas pressures for coatings deposited by new magnetron sputtering device on the basis of hollow cathode and rod-like target. In this work, a target composed of two semicylindrical constituents is considered. As the rod-like target can be made of multiple materials in any geometry, the model can be adjusted for any particular case. The calculations explain the general trend of experimental data behavior.