Electron beam devices for materials processing and analysis

Bluhm, H., Han, B., Chmielewski, A. G., Von Dobeneck, D., Gohs, U., Gstöttner, J., … Zywitzki, O. (2008). Electron beam devices for materials processing and analysis. In Vacuum Electronics: Components and Devices (pp. 155–230). Springer Berlin Heidelberg. https://doi.org/10.1007/978-3-540-71929-8_4