Silicon photonic wavelength cross-connect with integrated MEMS switching

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Abstract

We report on monolithically integrated wavelength cross-connects (WXCs) on an enhanced silicon photonic platform with integrated micro-electro-mechanical-system (MEMS) actuators. An 8 × 8 WXC with 8 wavelength channels comprising 16 echelle gratings and 512 silicon photonic MEMS switches is integrated on a 9.7 mm × 6.7 mm silicon chip. The WXC inherits the fundamental advantages of silicon photonic MEMS space switches, including low loss, broad optical bandwidth, large fabrication tolerance, and simple digital control. The WXC exhibits a low crosstalk of -30 dB, a submicrosecond switching time of 0.7 μs, and on-chip optical insertion losses varying from 8.8 dB to 16.4 dB. To our knowledge, it is the largest channel capacity (64 channels = 8 ports × 8 wavelengths) integrated WXC ever reported.

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Seok, T. J., Luo, J., Huang, Z., Kwon, K., Henriksson, J., Jacobs, J., … Wu, M. C. (2019). Silicon photonic wavelength cross-connect with integrated MEMS switching. APL Photonics, 4(10). https://doi.org/10.1063/1.5120063

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