CITATION STYLE
Diebold, A. C., Nelson, F. J., & Kamineni, V. K. (2013). Spectroscopic Ellipsometry of Nanoscale Materials for Semiconductor Device Applications. In Ellipsometry at the Nanoscale (pp. 557–581). Springer Berlin Heidelberg. https://doi.org/10.1007/978-3-642-33956-1_16
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