Microfabrication, Microstructures and Microsystems

Abstract

This review gives a brief introduction to materials and techniques used for microfabrication. Rigid materials have typically been used to fabricate microstructures and systems. Elastomeric materials are becoming attractive, and may have advantages for certain types of applications. Photolithography is the most commonly used technique for the fabrication of structures for microelectronic circuits, microelectromechanical systems, microanalytical devices and micro-optics. Soft Lithography represents a set of non-photolithographic techniques: it forms micropatterns of self-assembled monolayers (SAMs) by contact printing and generates microstructures of polymers by contact molding. The aim of this paper is to illustrate how non-traditional materials and methods for fabrication can yield simple, cost-effective routes to microsystems, and now they can expand the capabilities of these systems.