Volume Effects in Zone Plates

Abstract

Fresnel zone plates are key optical elements for nano-focusing of soft X-rays and multi-keV radiation. Their diffraction properties are dominated by high aspect ratio phase shifting nanostructures. The three-dimensional shape of high resolution zone structures and their volume diffraction effects are described by electrodynamic theory. In this review, volume diffraction zone plates are analyzed in different orders of diffraction, taking into account different possible imperfections. An efficient way towards sub-10nm focusing based on stacked volume zone plates is proposed.