Research on Silicon Content and Structure Relationship of Amorphous Si-DLC Films by Molecular Dynamics Simulations

Lan, H., Kumagai, T., & Kato, T. (2009). Research on Silicon Content and Structure Relationship of Amorphous Si-DLC Films by Molecular Dynamics Simulations. In Advanced Tribology (pp. 678–681). Springer Berlin Heidelberg. https://doi.org/10.1007/978-3-642-03653-8_220