Modeling and Simulation Software in MEMS Design

Abstract

Micro-Electro-Mechanical Systems (MEMS) is a process technology that combines mechanical and electrical components to make micro-scale range devices. A considerable cost of the device can be reduced if we simulate the design. There are many available simulation software to choose from, which in turn is one of the major challenge. The paper explores the functional and technical features of some software used in MEMS designing. It further presents the keypoints which we should acknowledge while selecting software. Basic features are available in all MEMS Simulation software. However, if the design involves specific physics, geometry, material or meshing, the search must be done to find the appropriate software. If the user intends to fabricate the device then software with a virtual fabrication tool needs to be selected.