Miniature, high-sensitivity, electron tunneling accelerometer

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Abstract

Prototype low-noise miniature accelerometers have been fabricated with electron-tunneling transducers. The electron-tunneling transducer permits detection of small displacements of the proof mass with high electrical response; such a transducer is essential for a high-performance miniature accelerometer. Prototype accelerometers have shown self-noise of approximately 10-7 g per root Hz or less between 10 and 200 Hz, and close to 10-8 g per root Hz near the resonant frequency of 100 Hz. Directivity measurements give nulls at least 50 dB below the maximum. A dual-axis prototype designed for underwater acoustic applications is packaged in an 8 cm3 volume with a mass of 8 grams.

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Rockstad, H. K., Reynolds, J. K., Tang, T. K., Kenny, T. W., Kaiser, W. J., & Gabrielson, T. B. (1995). Miniature, high-sensitivity, electron tunneling accelerometer. In International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings (Vol. 2, pp. 675–678). IEEE. https://doi.org/10.1121/1.410752

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