Microelectromechanical sensor-based system

Abstract

The microelectromechanical sensor-based system refers to the microsensor group or the microsensor cluster and their composite application. The multi-sensor integration and fusion technology has been widely used in many fields. Because of its deficiency and limitation, an individual sensor can provide only partial information of the particular environment and thus lacks robustness, and composite application of multiple sensors of various types is needed to acquire integrated information about different environments or different types. The microsensor is an important part of a microelectromechanical system (MEMS). Development of a microsensor inevitably leads to the formation of a microelectromechanical sensor-based system, the properties, design, and application methods of which should be studied.