This chapter presents experimental work on the piezoresistance of p-type 3C-SiC two-terminal and four-terminal resistors. Firstly, the experimental method to induce strain into SiC piezoresistors is discussed. Secondly, the gauge factor, the orientation dependence,...
CITATION STYLE
Phan, H.-P. (2017). Characterization of the Piezoresistive Effect in p-Type Single Crystalline 3C-SiC (pp. 63–99). https://doi.org/10.1007/978-3-319-55544-7_4
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