Modelling of chemical reactions under nonequilibrium halogenated electrical discharge conditions

Abstract

Statement of the problem and results are discussed concerning modelling of the chemical reactions under nonequilibrium electric discharge plasma conditions in SF6, CF4, CCl4 and SP6+02 mixtures. As the base for modelling the inner plasma parameters as measured are used in line with the quantitative study of chemical reaction kinetics including reactions with participation of the halogen atoms and halogenated radicals and molecules. © 1990 IUPAC