Abstract
The exceptionally low thermal conductivity of highly porous silicon has led to its use as a thermal insulator within microsystems. A comprehensive review of thermal conductivity literature is provided, together with examples of its use in microsensing and microphotonic systems.
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CITATION STYLE
APA
Nassiopoulou, A. G. (2014). Thermal isolation with porous silicon. In Handbook of Porous Silicon (pp. 753–765). Springer International Publishing. https://doi.org/10.1007/978-3-319-05744-6_77
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