A micro pump, compatible with multiple manufacturing methods, for fluidhandling in disposable microsystems

Schlüter, M., Kampmeyer, U., Hermsdorf, A., & Lilienhof, H. J. (2002). A micro pump, compatible with multiple manufacturing methods, for fluidhandling in disposable microsystems. In Micro Total Analysis Systems 2002 (pp. 154–156). Springer Netherlands. https://doi.org/10.1007/978-94-010-0295-0_51