Ring resonator designed for biosensing applications manufactured on 300 mm SOI in an industrial environment

Abstract

This paper reports on the design and characterization of a silicon nitride ring resonator-based device for biosensing manufactured with the STMicroelectronics 300 mm R&D Datacom Advanced PHotonic Nanoscale Environment (DAPHNE) industrial platform. The experimental results demonstrate a 300 nm/RIU bulk sensitivity and a 0.125 nm resonant peak shift per nanometer of biological adlayer thickness change. These results, comparable to the state of the art in ring resonator-based biosensors, demonstrate the potential of the DAPHNE industrial platform for manufacturing high-performance photonics biosensors at low cost.