Comparison of material measures for the determination of transfer characteristics of surface topography measuring instruments

Abstract

The description of the lateral resolution criterion for profile and areal surface topography measuring instruments is still under discussion in the international standardization. Several studies have examined the different methods proposed in the standardization individually. We describe a comprehensive examination and comparison of the different methods proposed by the standard. In doing so, the star-shaped grooves material measure (type ASG of ISO 25178-70) and the chirped standard are compared by using different measuring instruments and principles. In order to benchmark the results, they are compared to a third method for the transfer function determination which uses an Rk-calibrated material measure and is based on time series modeling. The results illustrate that both described methods have their specific advantages and disadvantages and are well-suited for individual fields of application.