Metal-containing materials as turning point of EUV lithography

Abstract

Limitations on current performances of the chemically amplified resists (CAR), as well as the productivity driven low exposure dose requirements (below 20 mJ/cm2), have brought the researchers to look at a novel class of materials as possible alternative to the CA resists to simultaneously achieve resolution, line-width roughness (LWR) and sensitivity. In 2014, imec has started a new project to look into novel materials for EUV lithography with particular attention to metal containing materials (MCR) to explore alternative approaches that can offer superior characteristics in photoresist imaging: improved LWR and line collapse, high sensitivity and high etch resistance. In this paper we report the first assessment on the enablers of the MCRs from a manufacturing compatibility prospective, as metal cross-contamination and outgassing, to a device integration prospective through the patterning on the ASML NXE:3300 full field scanner exposure tool, the etch performances and new litho-etch integration scheme for 1x nm technology and below. The results obtained are highly promising and give a clear indication that other chemical paths in novel resist formulations are possible in advanced EUV lithography.