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Journal ArticleOPEN ACCESS

Investigation of nanocrystal-(Ti,Al)N1−x/amorphous-SiNy composite films

  • Yau B
  • Huang J
  • Kan M
  • et al.
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena (2004) 22(2) 729-735
DOI: 10.1116/1.1688346
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Abstract

Nanocrystal-(Ti,Al)N1−x/amorphous-SiNy composite films were prepared by the magnetron sputtering codeposition process. The effects of deposition parameters on the composition, microstructure, and mechanical properties of nanocomposite films were investigated. Results indicated that the composition of nanocomposite films could be controlled through the codeposition process. Nanocrystal (Ti,Al)N1−x embedded in amorphous SiNy matrix with (200) preferred orientation was observed. The content of amorphous SiNy has substantial influence on the nanocrystallite size, columnar structure, surface morphology, and hardness.

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APA

Yau, B.-S., Huang, J.-L., Kan, M.-C., & Lii, D.-F. (2004). Investigation of nanocrystal-(Ti,Al)N1−x/amorphous-SiNy composite films. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 22(2), 729–735. https://doi.org/10.1116/1.1688346

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