Monte-Carlo simulations were applied to electron probe X-ray microanalysis of thin coatings on a bulk material. The X-ray signal from the film and its lateral extent as a function of film thickness, primary beam energy and angle of incidence were calculated. All contributions to the measured total X-ray signal were taken into account. These are: a) The signal induced by the primary electron beam. b) The signal induced by backscattering, considered both within the film and the substrate. c) The signal induced by characteristic and continuous X-rays, created within the substrate by incident and backscattered electrons, which ionise the atoms of the film in their way out of it.
CITATION STYLE
Valamontes, E., & Nassiopoulos, A. G. (1996). Electron Probe X-Ray Microanalysis of Coatings. In Microbeam and Nanobeam Analysis (pp. 605–610). Springer Vienna. https://doi.org/10.1007/978-3-7091-6555-3_56
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