A microscale linear phased-array ultrasonic transducer based on PZT ceramics

Abstract

In this paper, a microscale high-frequency ultrasonic transducer was prepared by combining traditional planar ultrasonic phased-array technology and micro processing technology. The piezoelectric ceramic material PZT was used as the functional material of the transducer. The number of the arrays was 72, the width of each array was 50 µm, the pitch of each array was 70 µm, and the length of each array was 3 mm. The PZT chip was finely ground to a thickness of 130 µm and could reach a frequency of 10 MHz. The experimental platform of micron-scale precision was set up for a beam-forming lateral sound field test and imaging experiment to validate the theoretical analysis. The echo imaging test showed that a mold with a feature size of about 400 µm could be imaged well.