Aluminum nitride (AlN) thin films were deposited by sputtering on Ti bottom electrodes and integrated on a kapton substrate for flexible and stretchable electronics. The aim of this work was to find the best combination of Ti underlayer sputtering conditions and AlN over-growth to obtain the (002) nitride orientation, fundamental requirement for the piezoelectric response of the material in piezoelectric devices. Flexible electronics represent today’s cutting-edge electronic technologies thanks to their low cost and easy fabrication scalability.
CITATION STYLE
Taurino, A., Signore, M. A., Catalano, M., Masieri, M., Quaranta, F., & Siciliano, P. (2018). (002)-Oriented AlN Thin Films Sputtered on Ti Bottom Electrode for Flexible Electronics: Structural and Morphological Characterization. In Lecture Notes in Electrical Engineering (Vol. 457, pp. 41–48). Springer Verlag. https://doi.org/10.1007/978-3-319-66802-4_7
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