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Journal Article

Physics of direct current plasma-enhanced chemical vapor deposition

NanoScience and Technology (2013) 5 93-109
DOI: 10.1007/978-3-642-30490-3_5
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Physics of direct current plasma-enhanced chemical vapor deposition. (2013). NanoScience and Technology, 5, 93–109. https://doi.org/10.1007/978-3-642-30490-3_5

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