Tools in a manufacturing plant require regular maintenance over their lifespan (e.g. cleaning, calibration, safety checks) in order to keep them running smoothly. In capital intensive industries, such as semi-conductor manufacturing, the scheduling of maintenance operations on the tools used in production is a critical function. Maintenance operations can be expensive to perform, so we should only perform them when necessary. However if maintenance is delayed too long, tools may run sub-optimally or break down (thus requiring even more expensive unplanned, corrective maintenance). Furthermore a tool that is undergoing maintenance may be partly or wholly unavailable for (revenue generating) production operations. We have developed a system to generate maintenance schedules for the IBM East Fishkill, New York 300mm semiconductor manufacturing plant. In the sections which follow, we give a description of the maintenance scheduling problem in semi-conductor manufacturing and discuss some of the challenges in solving it. We present a goal programming approach that incorporates both constraint programming and mixed-integer programming solution technologies. A system we have developed based on this approach is now in use within IBM. © 2010 Springer-Verlag.
CITATION STYLE
Davenport, A. (2010). Integrated maintenance scheduling for semiconductor manufacturing. In Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics) (Vol. 6140 LNCS, pp. 92–96). https://doi.org/10.1007/978-3-642-13520-0_12
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