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Ion beam analysis

BUNSEKI KAGAKU (1991) 40(11) 577-597
DOI: 10.2116/bunsekikagaku.40.11_577
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Abstract

Principles and applications of the analysing methods by using the ion beam, RBS, Channeling, ISS, ERD, NRA, PIXE and SIMS are surveyed. These methods are the powerful tools to study the element analysis, the structures of surface and interface, the distribution and the lattice locations of impurity atoms and the quality of crystals. © 1991, The Japan Society for Analytical Chemistry. All rights reserved.

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CITATION STYLE

APA

Fujimoto, F. (1991). Ion beam analysis. BUNSEKI KAGAKU, 40(11), 577–597. https://doi.org/10.2116/bunsekikagaku.40.11_577

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