Ion beam analysis

Abstract

Principles and applications of the analysing methods by using the ion beam, RBS, Channeling, ISS, ERD, NRA, PIXE and SIMS are surveyed. These methods are the powerful tools to study the element analysis, the structures of surface and interface, the distribution and the lattice locations of impurity atoms and the quality of crystals. © 1991, The Japan Society for Analytical Chemistry. All rights reserved.