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Capacitive transducers

  • Adams T
  • Layton R
Springer US, (2010), 231-253
DOI: 10.1007/978-0-387-09511-0_9
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Abstract

Capacitive transducers can be thought of as a modification of a standard electrical capacitor that allows at least one electrode to move. In the case of sensing, a mechanical input (pressure, force, or acceleration for example) applied to the transducer changes its...

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Adams, T. M., & Layton, R. A. (2010). Capacitive transducers. In Introductory MEMS (pp. 231–253). Springer US. https://doi.org/10.1007/978-0-387-09511-0_9

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