Quantitative convergent beam electron diffraction

Abstract

This paper describes the refinement method of quantitative electron diffraction using the convergent beam method, with emphasis on the algorithm and experimental measurements. Two examples are given. One is the lattice parameter measurement by comparing calculated and experimental CBED pattern using correlation and image processing for the enhancement of line contrast. The other is the structure factor determination of Si, used as a test of the refinement method. The possibilities of quantitative CBED are highlighted by a brief review of published applications to materials science.