On-chip pseudorandom testing for linear and nonlinear MEMS

Abstract

In this paper we study the use of pseudorandom test techniques for linear and nonlinear devices, in particular Micro Electro Mechanical Systems (MEMS). These test techniques lead to practical Built-In-Self-Test techniques (BIST). We will first present the pseudorandom test technique for Linear Time Invariant (LTI) systems. Next, we will illustrate and evaluate the application of these techniques for weakly nonlinear, purely nonlinear and strongly nonlinear devices. © 2007 Springer Science+Business Media, LLC.