In this chapter, we will give a qualitative description of a very simple discharge, will describe some experiments, and will evaluate the main parameters which determine the quality of a low-pressure discharge: plasma density, electron temperature, D ebye length and plasma frequency. Eventually, a model is introduced which was originally derived by Langmuir and M ott - S mith and which is now known as the Global Model.
CITATION STYLE
Franz, G. (2009). The plasma. In Low Pressure Plasmas and Microstructuring Technology (pp. 41–67). Springer Berlin Heidelberg. https://doi.org/10.1007/978-3-540-85849-2_3
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