Amorphous Hydrogenated Carbon Nanofilm

Abstract

Amorphous hydrogenated carbon (a-C:H) nanofilm is a metastable form of amorphous carbon with significant sp3 bonding. a-C:H is a semiconductor with a high mechanical hardness, chemical inertness, and optical transparency. This chapter will describe the deposition methods, deposition mechanisms, characterization methods, electronic structure, gap states, defects, doping, luminescence, field emission, mechanical properties, and some applications of a-C:H. The films have widespread applications as protective coatings in areas such as magnetic storage disks, optical windows, and micro- electromechanical devices (MEMs). 59.1