Porous silicon multilayers and superlattices

Abstract

Electrochemical etching of silicon can generate porous silicon where porosity is modulated with depth. The overall fabrication technique, experimental tips for improving uniformity, typical porosity profiles, and methods of patterning and stabilization are reviewed. Due to its ease of fabrication, such multilayers have been extensively fabricated and applied in different fields, such as photonics, phononics, sensing etc.