Epitaxial growth of mu;m-sized Cu pyramids on silicon

Abstract

Triangular and quadratic Cu pyramids were epitaxially grown on Si(111) and Si(100) substrates, respectively, by pulsed laser deposition at elevated substrate temperatures above 200°C as well as by post-annealing of closed Cu layers prepared at room temperature. In both cases, three-dimensional pyramids with edge lengths of up to 9 μm were obtained, as observed by scanning electron microscopy and atomic force microscopy. Although the macroscopic shape is a pyramid, microscopically the islands consist of columnar grains (with lateral sizes of only about 50 nm at 260°C). The size and shape of the pyramids can be controlled by the substrate used, the amount of material deposited, and the temperature during deposition or annealing. Additionally, first hints were found that the pyramids can be aligned by structuring the substrate. The formation of such large pyramids is explained by a fast diffusion of Cu atoms on Si over distances of some μm and a high jump probability to higher pyramid layers. © The Author(s) 2010.