Thin films of indium-tin oxide have been deposited by DC diode sputtering from an indium-tin alloy target in an argon, hydrogen and oxygen atmosphere. Films with sheet resistance of 11 ohms/square and 80% light transmission have been obtained. The effect of cathode composition and gas mixture on sheet resistance and optical transmission properties of the films have been studied. © 1977 the Indian Academy of Sciences.
CITATION STYLE
Radhakrishna, M. C., & Rao, M. R. (1977). Some properties of indium-tin oxide films. Pramana, 9(1), 1–6. https://doi.org/10.1007/BF02845926
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