Electrowetting-based actuation of liquid droplets for micro transportation systems

Abstract

This paper describes the electrowetting-on-dielectric (EWOD) actuation of liquid droplets for transportation of micromechanical parts. As dimensions of mechanical parts decrease, surface tension and electrostatic force become dominant compared to gravity force. Recent studies show that these forces can be utilized for actuation of liquid droplets and transportation of micromechanical elements. In this study, behavior of liquid droplet actuated by EWOD on a single substrate is analyzed using a high speed camera. Effects of applied voltage, switching frequency, and volume of the droplet are investigated experimentally. Furthermore, application of EWOD actuation to micro transportation systems is proposed. Surface properties for the conveyer pad are discussed. Copyright © 2010 by JSME.