A novel power-effective and reliable wireless thermal convection angular accelerometer without Any movable parts and grooved cavity

Abstract

This chapter integrated an active RFID tag with a thermal convection angular accelerometer on a flexible substrate. The first new idea was to make the device directly on a flexible substrate without any movable parts, so it is very easy to make and reliable. The second idea used the flexible substrate such as polyimide, since its thermal conductivity is much lower than silicon, and thus, it can save more power. The third new idea and the most powerful one is that the angular accelerometer is integrated with an active RFID tag on the same flexible substrate; thus, the device becomes a more useful wireless angular acceleration sensor. By using the traditional square chamber filled with carbon dioxide, the device sensitivity is 18.8 C/(rad/s2) and the response time is 158 μs. © 2013 Springer Science+Business Media New York.