Abstract
Various thick film sensors which are under development in the Microelectronics laboratory of the University of Oulu are described. More details are included on the capacitive thick film temperature sensor which is in the application stage. Other thick film sensors at present in the material development stage are the resistive humidity sensor, the gas sensor and the ion selective sensor. © 1980, Gordon and Breach Science Publishers, Inc.
Cite
CITATION STYLE
APA
Leppävuori, S. (1980). New Thick Film Sensors. ElectroComponent Science and Technology, 6(3–4), 193–197. https://doi.org/10.1155/APEC.6.193
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