The dual beam incorporates both a focused ion beam (FIB) and a scanning electron microscope (SEM) in a single system. This combination offers several advantages over a single-beam FIB system, especially for sample preparation and microscopy applications, in which the ion beam can be used for site-specific material removal and the SEM for nondestructive imaging and analysis. Dual-beam system configurations are presented, along with a number of key techniques and applications. These include precision cross-sectioning, TEM sample preparation, and automated 3D process control. © 2005 Springer Science+Business Media, Inc.
CITATION STYLE
Young, R. J., & Moore, M. V. (2005). Dual-beam (FIB-SEM) systems techniques and automated applications. In Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice (pp. 247–268). Springer US. https://doi.org/10.1007/0-387-23313-X_12
Mendeley helps you to discover research relevant for your work.