Abstract
The article is a discussion of the silicon on insulator (SOI) technologies. Two of the SOI approaches - SIMOX technique (Separation by Implanted Oxygen) and ZMR (Zone Melting Recrystallization) are outlined.
Cite
CITATION STYLE
APA
Tack, M. (1989). Silicon on insulator (SOI) technology. Nuclear Instruments and Methods in Physics Research, 275(3), 611–612.
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