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Challenges to Advanced Materials Characterization for ULSI Applications

  • Diebold A
Springer-Verlag, (2006), 421-435
DOI: 10.1007/1-84628-235-7_34
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Diebold, A. C. (2006). Challenges to Advanced Materials Characterization for ULSI Applications. In Materials for Information Technology (pp. 421–435). Springer-Verlag. https://doi.org/10.1007/1-84628-235-7_34

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