Preparation and Properties of Pyrolysis of Vanadium Oxide Films

Abstract

Vanadiumoxide films (V2O3, VO2, V2O5) were obtained by the pyrolysisof vanadium acetylacetonate (C5H7O2)4V in controlled atmosphere. The influence ofdeposition parameters on the film composition is studied. It wasrevealed that the composition of the gas carrier is themain factor determining the film composition. Electron diffraction and electronmicroscopy analysis of films are carried out. Temperature dependence ofresistance was studied. VO2 films deposited on glazed ceramic andsapphire change resistance by factor 103 at about 340°K. V2O5films had an activated conductivity. ©1972 The Electrochemical Society, Inc.