Research of influence of laser annealing parameters on structural and morphological properties of TiO2 thin films

Abstract

The TiO2 thin films are widely used as a transparent layer of n-type conductivity in the perovskite solar cells. Nanocrystalline TiO2 films were deposited on fluorine-doped tin oxide (FTO) coated glass substrates by centrifugation and subsequent laser annealing with a wavelength of 1064 nm. The influence of laser annealing on the grain size in the TiO2 film and spinning rate on the thickness of TiO2 film was investigated. It was found that the grain size in the TiO2 film ranges from 17 nm to 64 nm by using the laser annealing power of 30-70 W. The thickness of TiO2 film changes in range from 72 nm to 124 nm depending on the spinning rate. The optimum parameters of TiO2 thin film formed by laser annealing can increase the perovskite solar cell efficiency.