Electrically-activated, micromachined diaphragm valves

Abstract

Electrically activated diaphragm valves have been fabricated using heated bimetallic structures to provide the operating force. These valves can be designed to provide fully proportional control of flows in the range of 0-300 cm3/min at input pressures from near zero to over 100 PSIG. The valves are batch fabricated using silicon micromachining techniques. By combining these valves with pressure or flow sensing elements, closed-loop pressure or flow control is easily accomplished. The theory, materials, and fabrication technologies are well understood, which shortens the development time for these diaphragm valve devices. It is expected that these valves will greatly influence the types of integrated flow control systems available in the future.