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Journal ArticleOPEN ACCESS

Xe+ FIB Milling and Measurement of Amorphous Silicon Damage

  • Kelley R
  • Song K
  • Van Leer B
  • et al.
Microscopy and Microanalysis (2013) 19(S2) 862-863
DOI: 10.1017/s1431927613006302
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

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Kelley, R. D., Song, K., Van Leer, B., Wall, D., & Kwakman, L. (2013). Xe+ FIB Milling and Measurement of Amorphous Silicon Damage. Microscopy and Microanalysis, 19(S2), 862–863. https://doi.org/10.1017/s1431927613006302

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