High-resolution continuous-time interface for micromachined capacitive accelerometer

Abstract

A continuous-time accelerometer interface is feasible when high dynamic range together with wide signal band is required. In this paper, design of interface electronics for a capacitive sensor is presented. The interface design is focused on attaining resolutions up to 120dB together with a signal bandwidth of 300Hz. The essential circuit structures of the interface will be presented and analyzed in detail. Important sources of instabilities and issues that affect the dynamic properties of the sensor are discussed. Measured and simulated results of the closed-loop sensor will be provided to support the theory. Copyright © 2008 John Wiley & Sons, Ltd.