Inorganic–organic superlattice thin films by atomic/molecular layer deposition

Abstract

The combination of atomic and molecular layer deposition enables the fabrication of layered hybrid inorganic–organic structures with a high degree of controllability over the thickness and composition of individual layers. In addition to the increased potential for obtaining novel combinations of properties from the interplay of the inorganic and organic phases, layered hybrid structures offer opportunities for nanostructuring through the creation of superlattice structures where the organic layer thicknesses have been reduced to a single molecule. Even with very low organic content, this superlattice approach can lead to significant improvements in the inorganic host material’s performance by infl uencing properties such as thermal conductivity or the electronic band structure.